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SEMI E63-0999 (technical revision)
SEMI E30-94 (technical revision)
SEMI E39-1218 (title update)
This Guide proposes a frontside TSV integration scheme as one of the generic middle-end process flow
E17500 - SEMI E175 - Specification for Subsystem Energy Saving Mode Communication (SESMC) StdPbc-0998 SEMI E63-0999 (technical revision)This Standard was technically approved by the Information & Control Global Technical Committee. This edition was approved for publication by the global Audits and Reviews Subcommittee on October 17, 2016. Available at www. semiviews. org and www. semi. org in November 2016. The purpose of this Specification is to define communication between production equipment and the subsystem to enable energy saving mode (reduced energy consumption rate) operation